To summarize our previous article about Bio-FETs, Biologically active field-effect transistors (BioFETs) are miniaturized silicon-based electrochemical biosensors that can detect biomolecular interactions occurring at the gates of MOSFETs. Compared to the conventional optical and mass spectrometry detection methods, BioFETs provide fast, label-free, high sensitivity and direct electronic signal readout. FET-based biosensors have the potential for developing high-throughput label-free microarrays for applications in clinical diagnostics, drug discovery, food monitoring, and bioterrorist security inspection. The following steps are involved in the fabrication of a Bio-FET system: Finding a substrate suitable for serving as a FET site, and forming a FET on the substrate. Exposing an active site of the FET from the substrate. Providing a sensing film layer on the active site of FET. Providing a receptor on the sensing film layer in order to be ...